Plasma-enhanced CVD dopes carbon into WS2

Low-pressure CVD and Plasma- Enhanced CVD

LPCVD is a process used in the manufacturing of the deposition of thin films on semiconductors usually ranging from a few nanometers to many micrometers. LPCVD is used to deposit a wide range of possible film compositions with good conformal step coverage. These films include a variety of materials including polysilicon for gate contacts, thick oxides used for isolation, doped oxides for global...

Void Development in Plasma Enhanced CVD Models

In this paper we describe the implementation of Plasma Enhanced CVD (PECVD) models. We show numerical results for a fully three dimensional structure using level set method techniques. The terms being simulated contain both an isotropic and a source deposition term, along with the effects of reflection and re-emission. Overview Void formation when depositing thin dielectric layers is a major co...

Excellent Field Emission Properties of Short Conical Carbon Nanotubes Prepared by Microwave Plasma Enhanced CVD Process

Randomly oriented short and low density conical carbon nanotubes (CNTs) were prepared on Si substrates by tubular microwave plasma enhanced chemical vapor deposition process at relatively low temperature (350–550 C) by judiciously controlling the microwave power and growth time in C2H2 + NH3 gas composition and Fe catalyst. Both length as well as density of the CNTs increased with increasing mi...

Preferential Growth of Semiconducting Single-Walled Carbon Nanotubes by a Plasma Enhanced CVD Method

Single-walled carbon nanotubes (SWNT) are grown by a plasma enhanced chemical vapor deposition (PECVD) method at 600 °C. The nanotubes are of high quality as characterized by microscopy, Raman spectroscopy, and electrical transport measurements. High performance field effect transistors are obtained with the PECVD nanotubes. Interestingly, electrical characterization reveals that nearly 90% of ...

Preferential Biofunctionalization of Carbon Nanotubes Grown by Microwave Plasma-Enhanced CVD